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Beilstein J. Nanotechnol. 2015, 6, 451–461, doi:10.3762/bjnano.6.46
Figure 1: Schematic and photo of the setup including the optical beam deflection and the nested scanner desig...
Figure 2: A crucial precondition for a nested high resolution scanner design is the stability of the housing ...
Figure 3: a) Optical microscopy image of a SiOx calibration grating with various feature sizes. Demonstration...
Figure 4: a) Overlay of the optical microscope image with the AFM topography of an optical grating structure ...
Figure 5: Characterization of AFM cantilevers equipped with strain sensitive TMR sensors. a) The cantilevers ...
Figure 6: a) To improve lateral resolution, tips with a tip radius of 30 nm were grown by a combination of fo...
Figure 7: Dynamic mode imaging of FDTS-SAM samples using a TMR sensor with the feedback on amplitude and phas...